Superior Technical Services, home to a combined 120 years of experience servicing and maintaining Philips/FEI charged particle equipment. We are a reliable and proven 3rd party service provider for FEI and Philips SEM, FIB and Dual Beam equipment. In addition to onsite services we also operate a world class facility for refurbishing used equipment in Portland, Oregon.

  • Demand/Emergency Repairs
  • Planned Maintenance
  • Service Contracts
  • System Moves

We can tailor a maintenance contract to your needs. From industry standard all inclusive contracts, to labor only, to phone support, we are a flexible and responsive company, and can leverage this into creative and useful service contracts.


Please contact us for a quote. Please include your contact information, and preferred method of communication, and we will contact you promptly.